| 000 -LEADER |
|---|
| fixed length control field |
00259nam a2200097Ia 4500 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Stephen A Campbell |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Science and Engineering of Microelectronic Fabrication |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Date of publication, distribution, etc. |
1996 |
| Name of publisher, distributor, etc. |
Oxford University Press |
| Place of publication, distribution, etc. |
New York |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Page |
xv+536 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
BOOKS |