000 00273nam a22001097a 4500
020 _a9780070487093
100 _aTai-Ran Hsu
245 _aMEMS and Microsystems: Design and Manufacture
260 _aNew Delhi
_bMGH Education (India)
_c2015
300 _axii+436
942 _cBB
999 _c58719
_d58719