000 00275nam a22001097a 4500
020 _a9780070487093
100 _aTai Ran Hsu,
245 _aMEMS and Microsystems: Design and Manufacture
260 _aNew Delhi
_bMGH Education (India)
_c2016
300 _axii+436
942 _cBK
999 _c59223
_d59223